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Equipment Summary

Equipment Summary
A listing of all SNF, MOCVD, and ExFab equipment, its name, equipment group, staff in charge, location, and Training hours.

Electron Beam Writer

Badger Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
Raith 150 Electron beam writer raith All Swaroop Swaroop SNF 12 (a)

 

Optical Photolithography: Resist Coat, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
headway2 Headway Manual Resist Spinner All Mahnaz Mario  / Gary SNF 1 (a)
laurell-R Laurell Manual Resist Spinner All Mahnaz Mario  / Gary SNF 1 (a)
svgcoat / svgcoat2 SVG Resist Coat Tracks 1&2 All Uli / Mahnaz Gary  / Mario SNF 1.25 (a)
evgspraycoat EVG 101 Resist Spray Coater All Mahnaz Gary  / Mario SNF 1.5 (a)

 

Optical Photolithography: Exposure, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
asml ASML PAS 550 0/60 i-line Stepper All 1.Job Writing:
Mahnaz
2.Tool Training: Mahnaz
Gary  / Mario SNF

Job Writing: 2

Tool Training: 2 (a)

evalign EV Group Contact Aligner All Mahnaz Mario  / Gary SNF 1.5 (a)
 karlsuss / karlsuss2 Karl Suss MA-6 Contact Aligner 1&2   All  Uli/ Mahnaz   Gary   / Mario  SNF  1.5 (a)

 

ExFab: Patterning

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
3d-wax-printer Solidscape 3D Wax Printer Flexible Michelle Michelle ExFab, 155 TBD
nanoinkjet Fujifilm Dimatix Ink Jet Printer Flexible Michelle Michelle ExFab, 155 TBD
Nanoscribe Nanoscribe Photonics GT All Swaroop Swaroop ExFab, Stinson 2 hrs
Heidelberg Heidelberg MLA 150 All Swaroop Swaroop ExFab, Stinson 2 hrs, "All Litho" pre-req
Optomec-Printer Optomec Printer Cont Swaroop Swaroop / Gary ExFab, 155A Introduction/design - 2 hrs
Hands-on training - 6 hrs
Demonstration - 6 hrs
Alveole Primo Alveole Primo Cont Swaroop/Gaspard Swaroop/Gaspard Exfab, 151 2 hrs

 

Optical Photolithography: Develop, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
svgdev / svgdev2 SVG Resist Develop tracks 1&2 All Uli / Mahnaz Gary  / Mario SNF 0.5 (a)

 

Optical Photolithography: Ovens, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
bluem Blue M Programmable Oven Cont Mahnaz Mario / Gary SNF 0.5 (a)
oven110 110 C Oven All Uli Mario / Gary SNF (a)
oven90 90 C Oven All Uli Mario / Gary SNF (a)
ovensinge Singe Oven All Uli Mario / Gary SNF (a)
white-oven Mahnaz's Oven Cont Mahnaz Mario / Gary SNF 0.5 (a)
uvcure Ultraviolet Photoresist Cure All Mahnaz Mario / Gary SNF TBD (a)
yes YES Prime Oven All Uli / Mahnaz Mario / Gary SNF (a)

 

Chemical Vapor Deposition (CVD): Low Pressure, click here for summary

Badger Name
Lab Tab
- Sub Task
Tool
Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-LPCVD-teos2 teos2 Clean Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermcolto Thermco LPCVD Low Temperature Oxide Gold Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermoconitride1 Thermo LPCVD Nitride Clean Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermocopoly1 Thermco LPCVD Poly Clean Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-thermocopoly2 Thermco LPCVD Poly2 Gold Maurice Ted / Ray SNF 3 (b)
SNF-LPCVD-tylanbpsg LPCVD BPSG Clean/ Semiclean Maurice Ted / Ray SNF 3 (b)
nSIL-Deposition-nanotube First Nano carbon nanotube CVD furnace Gold Xiaoqing/
Greg Pitner
Ted / Ray nSIL 3
nSIL-Deposition-CVD-Graphene Aixtron Black Magic graphene CVD furnace Gold Xiaoqing/ Chris Neumann, Yong Cheol Shin, Ning Wang Ted / Ray nSIL 3

 

Chemical Vapor Deposition (CVD): Plasma Enhanced, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
sts STS Plasma Enhanced CVD Cont Usha Jim SNF 2 X 1.25
hdpcvd PlasmaTherm Versaline HDP VCD System All Usha/
Jim M
Elmer / Mike SNF 1.0
 ccp PlasmaTherm Shuttlecock PECVD System All Usha/
Jim M
Elmer / Mike SNF 1.0

 

Chemical Vapor Deposition (CVD): Atomic Layer Deposition ALD

Badger Name Equipment Name  Materials/
Equip Group
Process Maintenance/
Repair 
Location Training Hrs/
Notes
savannah Savannah Atomic Layer Deposition System Gold Michelle Jim SNF 3.0
See equipment page
 fiji1/fiji2 Fiji Atomic Layer Deposition - semi-clean chamber and gold chamber Semi-Clean (Fiji1)
Gold (Fiji2)
Michelle Jim SNF 3.0
see equipment page
fiji3 Fiji Atomic Layer Deposition- gold chamber, dielectric dedicated Gold Michelle Jim SNF covered in fiji1/2
mvd Savannah/Plasma Cleaner in Glovebox System Gold Michelle Jim SNF 3.0

 

Chemical Vapor Deposition (CVD):Epitaxial, click here or summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-epi2 Applied Materials Centurion Epitaxial System Clean Maurice Elmer / Mike SNF 2x2
MOCVD-aix200 Aixtron MOCVD - III-V system Cont Xiaoqing Ted / Ray/ Jim MOCVD 2x2+final
MOCVD-aix-ccs Aixtron MOCVD - III-N system Cont Xiaoqing Ted / Ray/ Jim MOCVD 2x2+final

Metallization and Sputtering, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-Metalization-Evaporation-innotec Innotec ES26C E-Gun Evaporator Cont Maurice Jim SNF 2 X 3
SNF-Metalica Metallica Sputter System Cont Xiaoqing/ Ludwig Galambos Jim SNF 2 X 3hr
SNF-Intlvac_sputter IntlVac Nanochrome I Sputter System Clean/ Semiclean Maurice Jim SNF 2 x 1
SNF-Metalization-Evaporation-intlvac_evap IntlVac Nanochrome I Evaporator System Clean/ Semiclean Mahnaz Jim SNF 2
 
nSIL-Depostion-lesker-sputter Lesker Sputter Cont Maurice Carsen EXFab 155A 1
nSIL-aja-evap AJA Evaporator Cont Xiaoqing Carsen EXFab 155A TBD
n Sil
-Deposition
- hummer
Hummer V Sputter Coater Cont Carsen Gary / Ted Exfab, 155A 1 hr
 SNSF-Evaporation-KJL  KJL Cont  Cliff  Cliff  SNSF  
 SNSF-Evaporation-MFS Small  MFS Small Cont  Tom Carver   Tom Carver  SNSF  
 SNSF-Evaporation-MFS large  MFS large Cont  Tom Carver   Tom Carver  SNSF  
 SNSF-Sputtering-Oerlikon Leybold  Oerlikon Leybold    Tom Carver   Tom Carver  SNSF  

Ex Fab: Deposition

Badger Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/
Repair
Location Training Hrs/
Notes
parcoater PDS 2010 LABCOTER 2 Flexible Michelle Ray ExFab, 155 3

Dry Etching, click here for summary

Badger Name
Lab Tab
- Sub Task
Tool
Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-Dry Etching amtetcher AMT Oxide Plasma Etcher Clean / Semiclean Usha Elmer / Mike SNF 1
SNF-Dry Etching drytek2 Drytek 100 Plasma Etcher All Usha Elmer / Mike SNF 1 (c)
SNF-Dry Etching gasonics Gasonics Aura Asher Clean / Semiclean see equipment page Elmer / Mike SNF  
SNF-Dry Etching lampoly Lam Research TCP 9400 Poly Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching matrix Matrix Plasma Resist Strip Cont Usha / Uli Elmer / Mike SNF 0.5
SNF-Dry Etching mrc MRC Reactive Ion Etcher Cont Usha Elmer / Mike SNF 1.5
SNF-Dry Etching p5000etch Applied Materials P5000 Etcher Semiclean Usha Elmer / Mike SNF 1.5
SNF-Dry Etching
PT-DSE
Plasma Therm Versaline LL ICP Deep Silicon Etcher Cont Usha
Elmer / Mike
SNF 1.5
SNF-Dry Etching
PT-MTL
Plasma Therm Versaline LL ICP Metal Etcher Cont Usha
Elmer / Mike
SNF 1
SNF-Dry Etching 
PT-Ox
Plasma Therm Versaline LL ICP Dielectric Etcher Cont Usha Elmer / Mike SNF 1
SNF-Dry Etching pquest Plasma Quest ECR Etcher Cont Usha Elmer / Mike SNF 1
SNF-Dry Etching
Ox-35
Oxford III-V etcher Cont see equipment page Elmer / Mike SNF 1.5
SNF-Dry Etching
oxford-rie
Oxford Dielectric Etcher Cont Usha Elmer SNF 1
SNF-Dry Etching stsetch STS Deep RIE Etcher Clean Usha Elmer / Mike SNF 1
SNF-Dry Etching
uetch
SPTS uetch vapor etch All Uli Jim  / Mike SNF 0.5
SNF-Dry Etching xactix Xactix Xenon Difluoride Etcher Clean / Semiclean /Cont Uli Elmer / Mike SNF 0.5
nSiL- Other
plasma-etch
Plasmaetch PE-50 Cont Sage Carsen SNF
Room 155
0.5
SNSF-FCR
Ion Mill
Intlvac Ion Mill Etcher Cont Cliff Cliff SNSF/ Spilker
Flexible Cleanroom
 
SNSF-NPCR
RIE: Oxford
PlasmaPro 80
Oxford PlasmaPro 80 - Reactive Ion etcher Cont Usha Cliff SNSF/ Spilker
Nanopatterning
Cleanroom
1

 

Annealing, Oxidation, and Doping, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
Thermco1-3 Thermco Oxidation Furnace  Clean Maurice Ted / Ray SNF 1 (b)
Thermco4 Thermco Oxidation Furnace  Cont Maurice Ted / Ray SNF 1
TylanFGA FormingGas Anneal Furnace Semiclean Maurice Ted / Ray SNF 1
Tylan6 Phos Predep Furnace (POCl3) Clean Maurice Ted / Ray SNF (b)(d)
Tylan9 Forming Gas Anneal Furnace Cont Maurice Ted / Ray SNF 3 (b)(d)

 

Rapid Thermal Annealing, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
SNF-Annealing-aw610-l AllWin 610 Rapid Thermal Annealer Clean/Semi-clean Maurice Elmer / Mike SNF 1
SNF-Annealing-aw610-r AllWin 610 Rapid Thermal Annealer Cont Maurice Elmer / Mike SNF 1

 

Wetbenches, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
cpd Critical Point Dryer Cont Uli / Maurice Jim / Mike SNF 2
lithosolv Lithography Solvent Bench All Uli / Mahnaz Mario SNF (a)
  Mask Scrubber N/A Mahnaz Mario SNF  
wbclean-1 and 2 (former wbdiff) Clean-1 and 2 Wetbench Clean Uli Jim / Gary SNF 2.25
wbebeam Ebeam Process Wetbench All TBA Gary  / Mario SNF NA
wbflexcorr-1 and-2 (former wbgaas) Flexible Corrosive Wetbench and GaAs All and GaAs Uli / Mary Jim / Gary SNF 2.25
wbflexcorr-3 and 4 (former wbgen) Flexible Corrosive Wetbench All (no GaAs) Uli / Mary Jim / Gary SNF 2.25
wbgen2-hp / wbgen2-rfx Germanium wbgen-2 Clean Ge Mary Jim / Gary SNF wbclean-1 and 2 required
wbmetal Metal Wetbench Semiclean Uli Jim / Gary SNF .75
wbmiscres Miscellaneous Photoresist Wetbench All Mahnaz / Uli Mario / Gary SNF (a)
wbclean_res-
piranha-hf-hotphos
Clean_resist-piranha-HF Wet Bench Clean Uli Jim / Gary SNF covered in wbclean-1 and2
wbdecon/clean-3 (former wbsilicide) Decon and Clean-3 Wetbench Clean Uli Jim / Gary SNF wbclean-1 and 2 required
wbflexsolv Solvent Wetbench All Uli / Mary Jim / Gary  / Mario SNF .5

 

ExFab: Wet Processing

 

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
WbExfab_Solv WbExfab_Solv All Swaroop Gary ExFab, Stinson 1 hr
Headway 3 Headway 3 All Swaroop Gary ExFab, Stinson 1 hr
WbExfab_Dev WbExfab_Dev All Swaroop Gary ExFab, Stinson 1 hr
Laurel_Dev-etch Laurel_Dev-etch All Swaroop Gary ExFab, Stinson 2 hrs
Micromist-coater Micromist Coater Cont Swaroop Swaroop ExFab, 155 2 hrs

 

Wafer Bonding, Sawing, and Polishing

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
nSIL-Machining-cmp GnP Poli-400L Hardware for both contaminated and clean Michelle Gary Yama Jim H. room 159 1.5
SNF-Waferbond-evbond EV Group Wafer Bonder Cont Mahnaz/Mary Mario / Gary SNF 4
SNF-Waferbond-ksbonder Karl Suss Wafer Bonder Clean Mahnaz Mario / Gary SNF 1
 nSiL-Other-flipchipbonder  Finetech Lambda  Cont  Usha  Elmer  SNF/L106/107
(Stinson)
 1
nSIL-Machining-DISCO wafersaw DISCO Wafer Saw Cont Xiaoqing, Usha Elmer/ Gary/ Ted room 159 1.5
nSIL-Machining-DISCO backgrind  DISCO Backgrind  Cont  Xiaoqing, Usha  TBD  room 159  1.5
 nSIL-Machining-Lasercutter Epilog Fusion M2 Lasercutter  Cont  Ted  Ted  room155A 1.0
 nSIL-Machining-Micromill  Micromill  Cont  Elmer  Elmer  room155A  1.0

 

Characterization and Testing, click here for summary

Badger Name Equipment Name  Materials/
Equip Group
Process/
Training
Maintenance/
Repair 
Location Training Hrs/
Notes
nSil
-Characterization
 - afm2
Digital Instruments Nanoscope 3000 AFM All Mahnaz Mario / Gary SNF AFM-nsil required 3
nSil
-Characterization
 - alphastep
Alphastep 500 Profilometer Cont Uli Mario / Gary SNF .25
nanospec / nanospec2 Nanospec Film Thickness Measurement System All Uli Gary / Mario SNF .25
prometrix Prometrix Resistivity Mapping System All Uli / Maurice Gary / Mario SNF .5
p2 Tencor P2 Profilometer Semiclean/
Clean
Uli Gary / Mario SNF .5
nSil
-Characterization
 - s-neox
Sensofar S-neox, non contact 3D optical profiling All Uli Gary / Mario SNF 1
stresstest Flexus 2320 All Uli Gary SNF .75
woollam J.A. Woollam M2000 Spectroscopic Ellipsometer  All Michelle Gary SNF 2
micromanipulator6000   micromanipulator6000 IV-CV probe station All Xiaoqing Jim SNF 0.5
nSiL
-Characterization
-malvern-dls
Malvern Dynamic Light Scattering (DLS) Zetasizer All Michelle TBD Mavericks (Room 155) NA
nSiL
-Characterization
-Sinton Lifetime Tester
Sinton Lifetime Tester Cont Swaroop Jim Exfab, 151 1 hr
nSiL
-Characterization
-AFM-Asylum
AFM-Asylum Cont Mahnaz Gary Exfab, 151 TBD
nSiL
-Characterization
-biologic
Bio-Logic Potentiostat Flexible Michelle Michelle ExFab, 155 TBD
nSiL
-Characterization
-jasco-uv-vis-nir

Jasco UV-Vis-NIR Spectrometer

Flexible

Michelle

Michelle

ExFab, 155

TBD

 

 Ex Fab: Controlled Environment

Badger Name Equipment Name Materials/
Equip Group
Process/
Training
Maintenance/Repair Location Training Hrs/
Notes
glovebox-l Glovebox- side with spin coater Flexible Michelle Ray ExFab, 155 TBD
glovebox-r Glovebox- side with transfer station Flexible Michelle Ray ExFab, 155 TBD
 fumehood1  Fumehood 1 Flexible Michelle  Michelle ExFab, 155  NA
 fumehood2 Fumehood 2 Flexible Michelle Michelle ExFab, 155  NA
fumehood3 Fumehood 3 Flexible Michelle Michelle ExFab, 155  NA
fumehood4 Fumehood 4 Flexible Michelle Michelle ExFab, 155  NA

Ex Fab: Other

Badger Name Equipment Name
Materials/
Equip Group
Process/
Training
Maintenance/Repair Location Training Hrs/
Notes
centrifuge Fisher AccuSpin 24C Flexible Michelle Michelle ExFab, 155 TBD
disperser IKA disperser Flexible Michelle Michelle ExFab, 155 TBD
thinky-mixer Thinky mixer Flexible Michelle Michelle ExFab, 155 NA
sonicator Q700 Probe Sonicator Flexible Michelle Michelle ExFab, 155 TBD
spincoat-g3p8 SCS G3P-8 Spin Coater Flexible Michelle Gary ExFab, 155 TBD
hotplate-1 Torrey Pines Hotplate Flexible Michelle Gary/Jim ExFab, 155 NA